Products for microelectronics
Perm Chemical Company LLC produces and supplies to its customers all over the world the following products for HighTech applications:
- Mickroelectronics
High performance etching gases in the processing of silicon wafers at line widths of 10-25-45 nm.
Hegafluoro-1,3-butadiene (99,995%)
Hexafluorobenzene
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Composite materials
Electronic gases applied in the process of plasma enhanced chemical vapor deposition of SiC
Methylsilane
Thrimethylsilane
- A boron source for the simultaneous deposition of boron and carbon, fabrication of ρ-type amorphous-Si layers in p-i-n Thin Film Photovoltaic (TFPV) applications:
Thtimethylborane