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Office in perm
Tel.: (342) 253 0767
Fax: (342) 253 0769
Office in moscow
Tel.: (495) 974 7401 EXT. 172
Fax: (495) 974 7402

Products for microelectronics


    Perm Chemical Company LLC produces and supplies to its customers all over the world the following products for HighTech applications:
     

    • Mickroelectronics

    High performance etching gases in the processing of silicon wafers at line widths of 10-25-45 nm.
    Hegafluoro-1,3-butadiene (99,995%)
    Hexafluorobenzene

    • A boron source for the simultaneous deposition of boron and carbon, fabrication of ρ-type amorphous-Si layers in p-i-n Thin Film Photovoltaic (TFPV) applications:

    Thtimethylborane

    • Composite materials

    Electronic gases applied in the process of plasma enhanced chemical vapor deposition of SiC
    Methylsilane
    Thrimethylsilane

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