Products for microelectronics
Perm Chemical Company LLC produces and supplies to its customers all over the world the following products for HighTech applications:
High performance etching gases in the processing of silicon wafers at line widths of 10-25-45 nm.
- A boron source for the simultaneous deposition of boron and carbon, fabrication of ρ-type amorphous-Si layers in p-i-n Thin Film Photovoltaic (TFPV) applications:
- Composite materials
Electronic gases applied in the process of plasma enhanced chemical vapor deposition of SiC